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@article{SAYGINER2021111023,

title = {Design, fabrication and assessment of an optomechanical sensor for pressure and vibration detection using flexible glass multilayers},

author = {Osman Sayginer and Erica Iacob and Stefano Varas and Anna Szczurek and Maurizio Ferrari and Anna Lukowiak and Giancarlo C Righini and Oreste S Bursi and Alessandro Chiasera},

url = {https://www.sciencedirect.com/science/article/pii/S092534672100224X},

doi = {https://doi.org/10.1016/j.optmat.2021.111023},

issn = {0925-3467},

year  = {2021},

date = {2021-01-01},

journal = {Optical Materials},

volume = {115},

pages = {111023},

abstract = {We introduce an easily implementable optomechanical device for pressure and vibration sensing using a multilayer structure on a flexible substrate. We present the design, fabrication and evaluation steps for a proof-of-concept device as well as optical glass components. The design steps include optical, mechanical, and optomechanical correlation simulations using the transfer matrix method, finite element analysis, geometric optics and analytical calculations. The fabrication part focuses on the deposition of multilayers on polymeric flexible substrates using the radio frequency sputtering technique. To investigate the quality of the glass coatings on polymeric substrates, atomic force microscopy and optical microscopy are also performed. Optical measurements reveal that, even after bending, there are no differences between multilayer samples deposited on the polymeric and SiO2 substrates. The performance assessment of the proof-of-concept device shows that the sensor resonance frequency is around 515 Hz and the sensor static response is capable of sensing from 50 Pa to 235 Pa.},

keywords = {Journal Article, Scopus Indexed},

pubstate = {published},

tppubtype = {article}

}

@article{CHEN2021100093,

title = {Tungsten oxide films by radio-frequency magnetron sputtering for near-infrared photonics},

author = {Hao Chen and Alessandro Chiasera and Stefano Varas and Osman Sayginer and Cristina Armellini and Giorgio Speranza and Raffaella Suriano and Maurizio Ferrari and Silvia Maria Pietralunga},

url = {https://www.sciencedirect.com/science/article/pii/S2590147821000231},

doi = {https://doi.org/10.1016/j.omx.2021.100093},

issn = {2590-1478},

year  = {2021},

date = {2021-01-01},

urldate = {2021-01-01},

journal = {Optical Materials: X},

volume = {12},

pages = {100093},

abstract = {Tungsten oxide WO3-x is a transition metal oxide and a wide bandgap semiconductor, with a wide range of possible optical and photonic applications. In dependence on the fabrication techniques different stoichiometric ratios (x) and crystalline phases are obtained, which end up with an overall polymorph and extremely versatile material, characterized by tailorable dielectric properties. In particular, WO3-x thin film deposition by Radio-Frequency (RF) sputtering techniques provides a precise control of thickness, composition and nanostructure. In this work we introduce and discuss a specific process of deposition, that is magnetron RF-sputtering as a suitable way to grow WO3-x thin films with selected properties. Possibility of integrating WO3-x thin film on to one-dimensional (1D) photonic crystal structures is also explored. Films are transparent in the near and short-wavelength infrared optical spectral range. Their quality is assessed by morphological, structural and compositional characterizations. Dielectric properties are characterized by optical spectroscopy and ellipsometry, the latter also evaluates the degree of optical anisotropy of thin films in their crystalline phase. An 1D photonics bandgap structure is designed, formed by a SiO2–TiO2 multilayer and capped with a 450 nm-thick transparent WO3-x film, so that surface confinement and local enhancement of the optical field at 1416 nm in the topmost WO3-x layer is obtained.},

keywords = {Journal Article, Scopus Indexed},

pubstate = {published},

tppubtype = {article}

}