Resonance frequency analysis of MEMS based on piezoelectric microcantilever beam for vibration energy harvesting applications – ABSTRACT

Project Tag: 2209OS Microfabricated microcantilevers are widely used as a nanomechanical tool for diagnostics, molecular detections and many sensor devices. Its easiness, sensitivity and cost of manufacture make it a key element for many applications. Piezoelectric material covered unimorph microcantilevers would provide energy generation from ambient sources as a result of its freely vibrating body. … [Read more…]